Our AFSEM® platform from GETec Microscopy Inc. / Quantum Design Microscopy is an add-on AFM for flexible, on-demand integration in our other SEMs, FIBs or Raman microscopes. The system provides standard AFM modes, including contact-, tapping- and phase-mode, which complements the aforementioned techniques by quantitative 3D morphology information, as representatively shown below. Especially in combination with analytical techniques such as energy-dispersive X-ray spectroscopy (EDXS) or Focused Ion Beam Processing (FIB) for localized sub-surface studies, the AFSEM® provides unique complementary information for a comprehensive material insight.