The Ultra 55 represents the latest development in GEMINI® technology and comprises a fully integrated energy and angle selective backscattered electron (EsB) detector.
The Ultra 55 offers ultra high resolution for both secondary electrons (SE) to image surface information and backscattered electrons (BSE) to present compositional information. The EsB detector features an integrated filtering grid to enhance image quality and requires no additional adjustments. The EsB detector is less sensitive for edge contrast and charging effects with enables precise imaging and measurement of boundaries, particles and features. Combined with the large multi-port analytical chamber, the fully motorised 5-axes motorised eucentric stage and the GEMINI® high current mode the ULTRA 55 also offers superb analytical capabilities.
Zeiss Ultra 55
Key Features
- Ultra high resolution imaging at low kV
- Ideal for precise boundary, feature, and particle measurements
- High efficiency EsB detector for compositional information
- High efficiency In-lens SE detector for high contrast surface imaging
- BSE imaging with the AsB-detector (Angle Selective BSE-Det.) at very short working distances – 1mm WD
- Ultra stable high current mode for x-ray analysis and EBSD applications
- Large five axes motorised eucentric stage
- Easy operation through Windows® XP based SmartSEMTM control software
Essential Specifications
Resolution
• 1.0 nm @ 15 kV
• 1.7 nm @ 1 kV
• 4.0 nm @ 0.1 kV
Emitter
Thermal Field Emission Gun (FEG), stability > 0.2%/h
Accelerating Voltage
20V – 30 kV
Probe Current
4 pA – 30 nA with the AsB-detector (Angle Selective BSE-Det.) at very short working distances
Detectors
• AsB (Angle selective Backscatter) detector
• EsB detector with filtering grid (grid voltage 0 – 1500V) BSE
• High efficiency In-lens SE detector SE
• Everhart-Thornley Secondary Electron Detector SE, BSE
• EDS Detector EDAX Trident
5-Axes Motorised Eucentric Specimen Stage
• X= 130 mm / Y= 130 mm / Z= 50 mm
• Tilt = -3 – 70°
• Rotation = 360° (continuous)
Image Processing
• Resolution: Up to 3072 x 2304 pixel
• Noise reduction: Seven integration and averaging modes
• SmartSEMTM with Windows®XP, operated by mouse, keyboard and joystick with optional control panel
Chamber
• 330 mm(Ø) x 270 mm (h)
• 2EDS ports 35° TOA
• CCD-camera with IR illumination
Additional methods
Wavelength dispersive X-ray spectroscopy (WDS)
Electron backscatter diffraction (EBSD)
